Development of nano-patterned sapphire substrates for deposition of AlGaInN semiconductors by molecular beam epitaxy
Thesis (M.Sc.Eng.) === This research addressed the design and fabrication of nano-patterned sapphire substrates (NPSS) as well as the growth by molecular-beam epitaxy (MBE) on such substrates of AlGaN and InGaN multiple quantum wells (MQWs). In recent years a number of LED manufacturers are developi...
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| Language: | en_US |
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Boston University
2017
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| Online Access: | https://hdl.handle.net/2144/21254 |