Distortion in conformable masks for evanescent near field optical lithography
In this thesis the in-plane pattern distortion resulting from the use of Evanescent Near Field Optical Lithography (ENFOL) masks was investigated. ENFOL is a high resolution low-cost technique of lithography that is able to pattern features beyond the diffraction limit of light. Due to its use of th...
Main Author: | Wright, Alan James |
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Language: | en |
Published: |
University of Canterbury. Electrical and Computer Engineering
2008
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Subjects: | |
Online Access: | http://hdl.handle.net/10092/1161 |
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