Properties and Characterisation of Sputtered ZnO
The aim of this work was the study of sputtered zinc oxide (ZnO) film deposition, the optimisation and characterisation of film properties and applications as a sensing material. In recent years there has been increased interest in ZnO in terms of its potential applications as piezoelectric films (o...
| Main Author: | |
|---|---|
| Language: | en |
| Published: |
University of Canterbury. Electrical and Computer Engineering
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10092/1900 |