Development of a PP-MOCVD System and its Design and Operational Parameters for Uniform Industrial Coatings on 3D Objects

Development of a PP-MOCVD System and its Design and Operational Parameters for Uniform Industrial Coatings on 3D Objects

Increase in demand for uniform ceramic coatings on larger industrial components have led to a need for a PP-MOCVD coating system scale up. The objective of this thesis is to develop a fully functional coating system operating in the PP-MOCVD regime that is able to deposit thin film ceramic coatings...

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Bibliographic Details
Main Author: Lee, Darryl Liang Wee
Language:en
Published: University of Canterbury. Dept. of Mechanical Engineering 2014
Subjects:
Pulsed Pressure Metal-Organic Chemical Vapour Deposition
PP-MOCVD
Scale-Up
Coatings
Thin Films
Uniformity
Conformality
Chemical Vapour Deposition
CVD
Design
Operational Parameters
Online Access:http://hdl.handle.net/10092/9644

Internet

http://hdl.handle.net/10092/9644

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