CMOS-MEMS Probe Arrays for Tip-Based Nanofabrication

CMOS-MEMS Probe Arrays for Tip-Based Nanofabrication

Scanning probe microscopy (SPM) tip-based nanofabrication (TBN) is a technique that directly creates a variety of nanostructures on a substrate using the nanoscale probe tips. SPM TBN possesses superior resolution and flexibility: nanostructures with feature size under 5 nm have been achieved via SP...

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Bibliographic Details
Main Author: Zhang, Yang
Format: Others
Published: Research Showcase @ CMU 2014
Subjects:
CMOS MEMS
TBN
SPM
electrothermal actuator
tip
goniometer
Online Access:http://repository.cmu.edu/dissertations/451
http://repository.cmu.edu/cgi/viewcontent.cgi?article=1451&context=dissertations

Internet

http://repository.cmu.edu/dissertations/451
http://repository.cmu.edu/cgi/viewcontent.cgi?article=1451&context=dissertations

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