Growth, Characterization and Contacts to Ga2O3 Single Crystal Substrates and Epitaxial Layers

Gallium Oxide (Ga2O3) has emerged over the last decade as a new up-and-coming alternative to traditional wide bandgap semiconductors. It exists as five polymorphs (α-, β-, γ-, δ-, and ε-Ga2O3), of which β-Ga2O3 is the thermodynamically stable form, and the most extensively studied phase. β-Ga2O3 has...

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Bibliographic Details
Main Author: Yao, Yao
Format: Others
Published: Research Showcase @ CMU 2017
Subjects:
Online Access:http://repository.cmu.edu/dissertations/921
http://repository.cmu.edu/cgi/viewcontent.cgi?article=1960&context=dissertations