Thin-film Bulk Acoustic Resonators on Integrated Circuits for Physical Sensing Applications
Merging chemical and biomolecular sensors with silicon integrated circuits has the potential to push complex electronics into a low-cost, portable platform, greatly simplifying system- level instrumentation and extending the reach and functionality of point of use technologies. One such class of sen...
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| Language: | English |
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2012
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| Online Access: | https://doi.org/10.7916/D8HT2MDJ |