Laser Crystallization of Silicon Thin Films for Three-Dimensional Integrated Circuits
The three-dimensional integration of microelectronics is a standard that has been actively pursued by numerous researchers in a variety of technical ways over the years. The primary aim of three-dimensional integration is to alleviate the well-known issues associated with device shrinking in conjunc...
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| Language: | English |
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2012
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| Online Access: | https://doi.org/10.7916/D8TQ67ND |