Microstructure Analysis and Surface Planarization of Excimer-laser Annealed Si Thin Films

Microstructure Analysis and Surface Planarization of Excimer-laser Annealed Si Thin Films

The excimer-laser annealed (ELA) polycrystalline silicon (p-Si or polysilicon) thin film, which influences more than 100-billion-dollar display market, is the backplane material of the modern advanced LCD and OLED products. The microstructure (i.e. ELA microstructure) and surface morphology of an EL...

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Bibliographic Details
Main Author: Yu, Miao
Language:English
Published: 2020
Subjects:
Engineering
Mechanical engineering
Thin films
Polycrystals
Microstructure
Microelectronics
Excimer lasers > Industrial applications
Online Access:https://doi.org/10.7916/d8-w3ee-nv95

Internet

https://doi.org/10.7916/d8-w3ee-nv95

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