Microstructure Analysis and Surface Planarization of Excimer-laser Annealed Si Thin Films
The excimer-laser annealed (ELA) polycrystalline silicon (p-Si or polysilicon) thin film, which influences more than 100-billion-dollar display market, is the backplane material of the modern advanced LCD and OLED products. The microstructure (i.e. ELA microstructure) and surface morphology of an EL...
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| Language: | English |
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2020
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| Online Access: | https://doi.org/10.7916/d8-w3ee-nv95 |