Electrical characteristics of Al/Si contacts formed by recoil implantation.

Electrical characteristics of Al/Si contacts formed by recoil implantation.

by Wah-chung Wong. === Thesis (M.Ph.)--Chinese University of Hong Kong, 1987. === Bibliography: leaves 155-162.

Bibliographic Details
Other Authors: Wong, Wah-chung.
Format: Others
Language:English
Published: Chinese University of Hong Kong 1987
Subjects:
Ion-atom collisions
Silicon crystals > Electric properties
Online Access:http://library.cuhk.edu.hk/record=b5885802
http://repository.lib.cuhk.edu.hk/en/item/cuhk-320073

Internet

http://library.cuhk.edu.hk/record=b5885802
http://repository.lib.cuhk.edu.hk/en/item/cuhk-320073

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