Transport properties of phosphorus and boron doped LPCVD silicon films and their interpretation.
by Pei-hsuon Chan. === Parallel title in Chinese characters. === Thesis (M.Ph.)--Chinese University of Hong Kong, 1988. === Bibliography: leaves 227-231.
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Format: | Others |
Language: | English |
Published: |
Chinese University of Hong Kong
1988
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Online Access: | http://library.cuhk.edu.hk/record=b5885957 http://repository.lib.cuhk.edu.hk/en/item/cuhk-320257 |