SiCl4 desorption in chlorine etching of Si(100): a first principle study.
Chan Siu-pang. === Thesis (M.Phil.)--Chinese University of Hong Kong, 1999. === Includes bibliographical references (leaves 45-47). === Abstract also in Chinese. === TITLE PAGE --- p.i === THESIS COMMUTE --- p.ii === ABSTRACT (English) --- p.iii === ABSTRACT (Chinese) --- p.iv === ACKNOWLEDGMENT...
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| Format: | Others |
| Language: | English Chinese |
| Published: |
1999
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| Online Access: | http://library.cuhk.edu.hk/record=b5889856 http://repository.lib.cuhk.edu.hk/en/item/cuhk-322603 |