Preparation and characterization of titanium silicide by MEVVA implantation.

Preparation and characterization of titanium silicide by MEVVA implantation.

by Lai Kwong-Yu. === Thesis submitted in: December 1998. === Thesis (M.Phil.)--Chinese University of Hong Kong, 1999. === Includes bibliographical references (leaves 90-101). === Abstracts in English and Chinese. === Chapter 1 --- Introduction --- p.1 === Chapter 1.1 --- Metal Silicides --- p.1 ==...

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Bibliographic Details
Other Authors: Lai, Kwong-Yu.
Format: Others
Language:English
Chinese
Published: 1998
Subjects:
Silicides
Titanium
Ion implantation
Vapor-plating
Electronics > Materials
Online Access:http://library.cuhk.edu.hk/record=b5890083
http://repository.lib.cuhk.edu.hk/en/item/cuhk-322632

Internet

http://library.cuhk.edu.hk/record=b5890083
http://repository.lib.cuhk.edu.hk/en/item/cuhk-322632

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