study of induced damages in surface cleaning and ion mixing in high resolution depth profiling under low energy argon ion sputtering.
by Kwok-fung Kan = 低能量氬離子濺射於表面淸潔及高解像深度剖析時所產生的損傷及離子混合的硏究 / 簡國豐. === Thesis (M.Phil.)--Chinese University of Hong Kong, 2000. === Includes bibliographical references. === Text in English; abstracts in English and Chinese. === by Kwok-fung Kan = Di neng liang ya li zi jian she yu biao mian qing jie ji...
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| Format: | Others |
| Language: | English Chinese |
| Published: |
2000
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| Online Access: | http://library.cuhk.edu.hk/record=b5890537 http://repository.lib.cuhk.edu.hk/en/item/cuhk-323066 |