Yttria stabilized zirconia buffered silicon: substrates for YBCO microwave applications
The use Yttria-Stabilized Zirconia (YSZ) as a buffer layer for YBa2Cu3O7-x (YBCO) thin films on (100) silicon (Si) substrates is investigated. YSZ was grown using on-axis pulsed D.C. (PDC) and R.F. magnetron sputtering from a 99.9% pure YSZ target [(Y2O3)0.08(ZrO2)0.92]. Sputtering was carried out i...
Main Author: | |
---|---|
Format: | Others |
Published: |
FIU Digital Commons
1998
|
Subjects: | |
Online Access: | http://digitalcommons.fiu.edu/etd/1878 http://digitalcommons.fiu.edu/cgi/viewcontent.cgi?article=3092&context=etd |