Yttria stabilized zirconia buffered silicon: substrates for YBCO microwave applications

The use Yttria-Stabilized Zirconia (YSZ) as a buffer layer for YBa2Cu3O7-x (YBCO) thin films on (100) silicon (Si) substrates is investigated. YSZ was grown using on-axis pulsed D.C. (PDC) and R.F. magnetron sputtering from a 99.9% pure YSZ target [(Y2O3)0.08(ZrO2)0.92]. Sputtering was carried out i...

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Bibliographic Details
Main Author: Brown, Philip D.
Format: Others
Published: FIU Digital Commons 1998
Subjects:
Online Access:http://digitalcommons.fiu.edu/etd/1878
http://digitalcommons.fiu.edu/cgi/viewcontent.cgi?article=3092&context=etd