Microfabrication of Magnetostrictive Beams for Integrated Sensor Systems
This dissertation reports the fabrication and characterization of integrated micro sensors consisting of magnetostrictive 500 μm long cantilevers or bridges and conducting interrogation elements. The thin films are fabricated by sputter deposition of NiFe doped with B and Mo and their magnetic prope...
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| Language: | en |
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2012
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| Online Access: | Alfadhel, A. (2012). Microfabrication of Magnetostrictive Beams for Integrated Sensor Systems. KAUST Research Repository. https://doi.org/10.25781/KAUST-LOWLN http://hdl.handle.net/10754/233791 |