Microfabrication of Magnetostrictive Beams for Integrated Sensor Systems
This dissertation reports the fabrication and characterization of integrated micro sensors consisting of magnetostrictive 500 μm long cantilevers or bridges and conducting interrogation elements. The thin films are fabricated by sputter deposition of NiFe doped with B and Mo and their magnetic prope...
Main Author: | Alfadhel, Ahmed |
---|---|
Other Authors: | Kosel, Jürgen |
Language: | en |
Published: |
2012
|
Subjects: | |
Online Access: | Alfadhel, A. (2012). Microfabrication of Magnetostrictive Beams for Integrated Sensor Systems. KAUST Research Repository. https://doi.org/10.25781/KAUST-LOWLN http://hdl.handle.net/10754/233791 |
Similar Items
-
MAELASviewer: An Online Tool to Visualize Magnetostriction
by: Pablo Nieves, et al.
Published: (2020-11-01) -
Theory, Instrumentation and Applications of Magnetoelastic Resonance Sensors: A Review
by: Craig A. Grimes, et al.
Published: (2011-03-01) -
Comprehensive performance study of magneto cantilevers as a candidate model for biological sensors used in lab-on-a-chip applications
by: Hamidreza Saberkari, et al.
Published: (2015-01-01) -
SENSOR PERFORMANCE OF CANTILEVERED MAGNETOSTRICTIVE BEAM
by: Cao Qinghua, et al.
Published: (2014-09-01) -
Giant Stress Impedance Magnetoelastic Sensors Employing Soft Magnetic Amorphous Ribbons
by: Juan Jesús Beato-López, et al.
Published: (2020-05-01)