Movable MEMS Devices on Flexible Silicon
Flexible electronics have gained great attention recently. Applications such as flexible displays, artificial skin and health monitoring devices are a few examples of this technology. Looking closely at the components of these devices, although MEMS actuators and sensors can play critical role to ex...
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| Language: | en |
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2013
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| Online Access: | http://hdl.handle.net/10754/290920 |