Development of a Multi-User Polyimide-MEMS Fabrication Process and its Application to MicroHotplates
Micro-electro-mechanical systems (MEMS) became possible thanks to the silicon based technology used to fabricate integrated circuits. Originally, MEMS fabrication was limited to silicon based techniques and materials, but the expansion of MEMS applications brought the need of a wider catalog of mate...
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| Language: | en |
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2013
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| Online Access: | Lizardo, E. B. (2013). Development of a Multi-User Polyimide-MEMS Fabrication Process and its Application to MicroHotplates. KAUST Research Repository. https://doi.org/10.25781/KAUST-9IC07 http://hdl.handle.net/10754/291093 |