Electrothermally Tuned and Electrostatically Actuated MEMS Resonators: Dynamics and Applications
The objective of this thesis is to present a theoretical and experimental investigation of the dynamics of micro and nano-electromechanical systems electrothermally tuned and electrostatically actuated, and explore their potential for practical applications. The first part of the dissertation pre...
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| Language: | en |
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2019
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| Online Access: | http://hdl.handle.net/10754/652869 |