Low-Noise High-Precision Readout Circuits for Capacitive MEMS Accelerometer

Low-Noise High-Precision Readout Circuits for Capacitive MEMS Accelerometer

Over the past two decades, Micro-Electro-Mechanical System (MEMS) based accelerometers, benefiting from relatively simple structure, low-power consumption, high sensitivity, and easy integration, have been widely used in many industrial and consumer electronics applications. For the high precision a...

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Bibliographic Details
Main Author: Yang, Kuilian
Other Authors: Fariborzi, Hossein
Language:en
Published: 2021
Subjects:
Low-Noise
Readout Circuits
MEMS Accelerometer
chopper stabilization
sub-μg noise
Online Access:Yang, K. (2021). Low-Noise High-Precision Readout Circuits for Capacitive MEMS Accelerometer. KAUST Research Repository. https://doi.org/10.25781/KAUST-BMIGU
http://hdl.handle.net/10754/669009

Internet

Yang, K. (2021). Low-Noise High-Precision Readout Circuits for Capacitive MEMS Accelerometer. KAUST Research Repository. https://doi.org/10.25781/KAUST-BMIGU
http://hdl.handle.net/10754/669009

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