Low-Noise High-Precision Readout Circuits for Capacitive MEMS Accelerometer
Over the past two decades, Micro-Electro-Mechanical System (MEMS) based accelerometers, benefiting from relatively simple structure, low-power consumption, high sensitivity, and easy integration, have been widely used in many industrial and consumer electronics applications. For the high precision a...
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Language: | en |
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2021
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Online Access: | Yang, K. (2021). Low-Noise High-Precision Readout Circuits for Capacitive MEMS Accelerometer. KAUST Research Repository. https://doi.org/10.25781/KAUST-BMIGU http://hdl.handle.net/10754/669009 |