Micromachined capacitive accelerometer with crab-shape

Thesis (MTech (Mechanical Engineering))--Cape Peninsula University of Technology, 2005 === Perhaps more popular than the piezoresistive type are the capacitive type of micromachined accelerometers. The capacitive accelerometer has many fine characteristics, such as simple structure, high sensiti...

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Bibliographic Details
Main Author: Guo, Fei
Language:en
Published: Cape Peninsula University of Technology 2013
Subjects:
Online Access:http://hdl.handle.net/20.500.11838/1282