Mechanics of micro capacitive accelerometer with u-shape cantilever beam

Thesis (MTech (Mechanical Engineering))--Cape Peninsula University of Technology, 2005. === Due to an increasing in industrial micromation need in recent years, the use of micro accelerometers has been highly increased. Consecutively, this has promoted research activities in this field; capacitive...

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Bibliographic Details
Main Author: Wang, Lin
Other Authors: Sun, Bohua
Language:en
Published: Cape Peninsula University of Technology 2018
Subjects:
Online Access:http://hdl.handle.net/20.500.11838/2616