Computational modelling of a hot-wire chemical vapour deposition reactor chamber

>Magister Scientiae - MSc === In this thesis, I explore the subjects of fluid dynamics and the Hot-Wire Chemical Vapour Deposition (HWCVD) process. HWCVD, in its simplicity, is one of the more powerful and elegant deposition techniques available in thin film research which allows for both the g...

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Bibliographic Details
Main Author: Fourie, Lionel Fabian
Other Authors: Square, L. C.
Language:en
Published: University of Western Cape 2020
Subjects:
Online Access:http://hdl.handle.net/11394/7523