Correlation of argon-copper sputtering mechanisms with experimental data using a digital computer simulation technique
Approved for public release; distribution is unllimited === The sputtering process has been investigated by simulating the sputtering of single-crystal copper with 1=7 keV argon. A digital computer was used to build the crystal, bombard it, and move crystal atoms. Four mechanisms were observed whi...
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| Language: | en_US |
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Monterey, California. U.S. Naval Postgraduate School
2012
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| Online Access: | http://hdl.handle.net/10945/11873 |