Direct electric field visualization in semiconductor planar structures
A new technique for imaging the 2D transport of free charge in semiconductor structures is used to directly map electric field distributions in operating devices. Direct transport imaging is demonstrated in a scanning electron microscope, using an optical microscope and a high sensitivity charge cou...
Main Author: | |
---|---|
Other Authors: | |
Format: | Others |
Published: |
Monterey California. Naval Postgraduate School
2012
|
Subjects: | |
Online Access: | http://hdl.handle.net/10945/2398 |