Direct electric field visualization in semiconductor planar structures

A new technique for imaging the 2D transport of free charge in semiconductor structures is used to directly map electric field distributions in operating devices. Direct transport imaging is demonstrated in a scanning electron microscope, using an optical microscope and a high sensitivity charge cou...

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Bibliographic Details
Main Author: Andrikopoulos, Pavlos
Other Authors: Haegel, Nancy M.
Format: Others
Published: Monterey California. Naval Postgraduate School 2012
Subjects:
Online Access:http://hdl.handle.net/10945/2398