Výbojové zdroje plazmatu s podporou magnetického pole
This work concerns the low-temperature plasma diagnostic in the dcdischarge in the cylindrical magnetron in argon. For measurements Langmuir and emissive probes were used. The aim of this diploma work was the diagnostics of the radial plasma parameters especially with the improved construction of th...
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| Format: | Dissertation |
| Language: | Slovak |
| Published: |
2010
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| Online Access: | http://www.nusl.cz/ntk/nusl-286226 |