Tryskové plazmatické systémy - experiment a model

In the present work we study the ow of working gas through a plasmajet system. In this work we describe the basic principle of hollow cathode discharge and its use for technological applications, mainly for thin layers coating. One of the important parameters during the deposition is the speed of th...

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Bibliographic Details
Main Author: Rubovič, Peter
Other Authors: Kudrna, Pavel
Format: Dissertation
Language:Slovak
Published: 2010
Online Access:http://www.nusl.cz/ntk/nusl-286233