Diagnostika nízkoteplotního plazmatu pomocí Langmuirovy a emisní sondy
Magnetron sputtering belongs to the most important methods of production of thin films with a wide range of physical properties. Examples include hard, wear-resistant coatings, low friction ones, corrosion resistant ones as well as coatings with specific electrical or optical properties. During the...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Dissertation |
| Language: | Czech |
| Published: |
2008
|
| Online Access: | http://www.nusl.cz/ntk/nusl-291425 |