Studium nízkotlakého systému HCPJ pro depozici tenkých vrstev Ti02
Title: The investigation of low pressure HCPJ system for TiO2 film deposition Author: Mgr. Roman Perekrestov Department / Institute: Department of Surface and Plasma Science Supervisor of the doctoral thesis: doc. Mgr. Pavel Kudrna, Dr. Abstract: Plasma sources are widely used for deposition of thin...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Doctoral Thesis |
| Language: | English |
| Published: |
2016
|
| Online Access: | http://www.nusl.cz/ntk/nusl-348937 |