Studium depozice katalytických materiálů do kanálů palivových mikročlánků na čipu
This diploma thesis is interested in usage of Electron Beam lithography process as an instrument of transport of contacts and catalytic layers to micro-channels of the micro monolithic planar fuel cell. Experimental part includes optimization of the PMMA resist deposition method on the 3D topography...
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| Format: | Dissertation |
| Language: | English |
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2016
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| Online Access: | http://www.nusl.cz/ntk/nusl-352618 |