Studium depozice katalytických materiálů do kanálů palivových mikročlánků na čipu
This diploma thesis is interested in usage of Electron Beam lithography process as an instrument of transport of contacts and catalytic layers to micro-channels of the micro monolithic planar fuel cell. Experimental part includes optimization of the PMMA resist deposition method on the 3D topography...
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| Format: | Dissertation |
| Language: | English |
| Published: |
2016
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| Online Access: | http://www.nusl.cz/ntk/nusl-352618 |
| Summary: | This diploma thesis is interested in usage of Electron Beam lithography process as an instrument of transport of contacts and catalytic layers to micro-channels of the micro monolithic planar fuel cell. Experimental part includes optimization of the PMMA resist deposition method on the 3D topography - spray coating - is performed with alternative spray coating system. The optimal spin speed resist, molecular weight and concentration is chosen during the optimization. Parameters of the exposition, developing and lift-off are also modified and three EBL processes are performed. The first ensures deposition of Au contacts to the channels; the second is for application of Pt layer to the cathode channel and the last aimed to cover the anode channel with CeO/CNx layer. All layers are deposited by magnetron sputtering. |
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