Sestavení a diagnostika aparatury pro depozici titanoxidových vrstev
This diploma thesis describes compilation of device for deposition of thin-walled lays a diagnosis of some its parts. In the beginning part this thesis are given reason needs using plasma processes in the industry. Next capture describes main parts different kinds of discharges. Practical part is ma...
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| Format: | Dissertation |
| Language: | Czech |
| Published: |
2008
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| Online Access: | http://www.nusl.cz/ntk/nusl-45534 |