APPLICATION OF TRACK ETCHED GLASS MEMBRANES FOR SUBMICRON FABRICATION, LITHOGRAPHY AND ERROR RECTIFICATION

The fabrication of new and novel materials contributes to qualitative enhancement of human life. Among the various branches of fabrication, nanolithography is an emerging neoteric fabrication technology. Even though nanofabrication procedures and the techniques can be precisely controlled through va...

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Bibliographic Details
Main Author: Ramiah Rajasekaran, Pradeep
Format: Others
Published: OpenSIUC 2013
Subjects:
Online Access:https://opensiuc.lib.siu.edu/dissertations/756
https://opensiuc.lib.siu.edu/cgi/viewcontent.cgi?article=1759&context=dissertations