Manufacturing Gallium Doped ZnO Thin Films Suitable for Use in Thin Film Transistors Using Unbalanced Magnetron Sputtering
Gallium doped zinc oxide (GZO) thin films were deposited onto Si (100) substrates. Depositions were performed at relatively low temperatures suitable for use in manufacturing thin films on plastic substrates. Substrates were thermally oxidized, and then thin films were deposited via radio frequency...
| Main Author: | |
|---|---|
| Format: | Others |
| Published: |
OpenSIUC
2013
|
| Online Access: | https://opensiuc.lib.siu.edu/theses/1117 https://opensiuc.lib.siu.edu/cgi/viewcontent.cgi?article=2128&context=theses |