Electrical characterization and modeling of low dimensional nanostructure FET
At the beginning of this thesis, basic and advanced device fabrication process which I haveexperienced during study such as top-down and bottom-up approach for the nanoscale devicefabrication technique have been described. Especially, lithography technology has beenfocused because it is base of the...
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Language: | fr |
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2011
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Online Access: | http://www.theses.fr/2011GRENT070/document |