Élaboration de carbure de silicium amorphe hydrogéné par PECVD : Optimisation des propriétés optiques, structurales et passivantes pour des applications photovoltaïques

Élaboration de carbure de silicium amorphe hydrogéné par PECVD : Optimisation des propriétés optiques, structurales et passivantes pour des applications photovoltaïques

Notre étude concerne la mise en place et le développement de dépôts de carbure de silicium amorphe hydrogéné (a-SiCx:H) à basse température (370°C), par voie PECVD, sur un réacteur PECVD semi-industriel à faible fréquence (440 kHz). Les propriétés chimiques, optiques et de passivation de surface des...

Full description

Bibliographic Details
Main Author:	Gaufrès, Aurélien
Other Authors:	Lyon, INSA
Language:	fr
Published:	2014
Subjects:	Electrotechnique Cellule photovoltaïque Dépôt chimique en phase vapeur assisté par plasma - PECVD Réacteur PECVD Propriété optique Carbure de silicium amorphe hydogéné Propriété passivante Electrotechnics Photovoltaic Cell PECVD - Plasma Enhanced Chemical Vapour Deposition PECVD reactor Optical properties Hydrogenated amorphous silicon carbide Passivation 537.540 72
Online Access:	http://www.theses.fr/2014ISAL0005

Similar Items

Hydrogenated Amorphous Silicon Carbide Prepared using DC Saddle Field PECVD for Photovoltaic Applications
by: Yang, Cheng-Chieh
Published: (2011)

Hydrogenated Amorphous Silicon Carbide Prepared using DC Saddle Field PECVD for Photovoltaic Applications
by: Yang, Cheng-Chieh
Published: (2011)

Spectroscopic ellipsometry analysis of the component layers of hydrogenated amorphous silicon triple junction solar cells
by: Stoke, Jason A.
Published: (2008)

Modification des propriétés de surface de couches DLC obtenues par PECVD/PVD dans le but d'optimiser leur comportement tribologique en milieu lubrifié : application aux moteurs thermiques pour véhicules terrestres
by: Kilman, Laureline
Published: (2015)

THE APPLICATION OF PULSE MODULATED PLASMA TO THE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF DIELECTRIC MATERIALS
by: QI, YU
Published: (2005)

Croissance et propriétés des couches minces de silicium hydrogéné déposées au voisinage de la zone de transition amorphe nanocristalline par PECVD à partir d’un plasma de silane dilué dans un gaz d’argon.
by: Amrani, Rachid
Published: (2013)

III-V/Si tandem solar cells : an inverted metamorphic approach using low temperature PECVD of c-Si(Ge)
by: Hamon, Gwenaëlle
Published: (2018)

Contribution à l'étude expérimentale et théorique des cristaux photoniques unidimensionnels hybrides à base de HMDSO et de silicium
by: Amri, Raja
Published: (2017)

The importance of ions in low pressure PECVD plasmas
by: Andrew eMichelmore, et al.
Published: (2015-02-01)

Fabrication and study of carbon nanotube by plasma enhanced chemical vapor deposition (PECVD)
Published: (2004-06-01)

Síntese e caracterização de nanotubos de carbono mediante as técnicas de CVD e PECVD.
by: Diego Edison Lopez Silva
Published: (2016)

Síntese e caracterização de nanotubos de carbono mediante as técnicas de CVD e PECVD.
by: Lopez Silva, Diego Edison
Published: (2016)

Estudo das propriedades químicas, morfológicas e estruturais de oxinitreto de silício depositado por PECVD
by: Wanderlã Luis Scopel
Published: (2002)

Estudo das propriedades químicas, morfológicas e estruturais de oxinitreto de silício depositado por PECVD
by: Scopel, Wanderlã Luis
Published: (2002)

Characterising a Custom-Built Radio Frequency PECVD Reactor to Vary the Mechanical Properties of TMDSO Films
by: Racim Radjef, et al.
Published: (2021-09-01)

Influence du désordre sur les propriétés opto-électroniques de films minces de cyclohexane déposés par polymérisation plasma
by: Manaa, Chadlia
Published: (2015)

Contribution au photovoltaïque de première génération : du matériau silicium aux couches diélectriques
by: Fourmond, Erwann
Published: (2011)

Vers une ingénierie de bandes des cellules solaires à hétérojonctions a-Si:H / c-Si. Rôle prépondérant de l'hydrogène.
by: Damon-Lacoste, J.
Published: (2007)

Chemical and Electronic Structure of Aromatic/Carborane Composite Films by PECVD for Neutron Detection
by: Dong, Bin
Published: (2016)

Microstructure Related Characterization of a-Si:H Thin Films PECVD Deposited under Varied Hydrogen Dilution
by: Veronika Vavrunkova, et al.
Published: (2007-01-01)

Deposição e caracterização físico-química de filmes finos nanoestruturados (nanocompósitos) contendo Ti, C, N e O, Obtidos a partir de um precursor líquido (Ti(OC2H5)4)
by: Antunes, Vinícius Gabriel, 1984-
Published: (2014)

Long-Term, High Temperature Mechanical Stability of PECVD Amorphous Silicon Carbide for Use as Structural Material in Harsh Environment MEMS
by: LaBarbera, Michael Anthony
Published: (2014)

Evaluation of blood compatibility of plasma deposited heparin-like films and SF6 plasma treated surfaces
by: Ivanira Antunes Perrenoud, et al.
Published: (2010-03-01)

Controlled biodegradation of metallic biomaterials by plasma polymer coatings using hexamethyldisiloxane and allylamine monomers
by: Teske Michael, et al.
Published: (2019-09-01)

Annealing of Boron-Doped Hydrogenated Crystalline Silicon Grown at Low Temperature by PECVD
by: Marta Chrostowski, et al.
Published: (2019-11-01)

Películas amorfas de SixCyN depositadas mediante ECR-PECVD
by: Barbadillo, L., et al.
Published: (2000-08-01)

Characterization and improvement of silicon solar cells : enhanced light acceptance and better separation and extraction of charge-carriers
by: Klein, David
Published: (2009)

Estudo da viabilidade de fabricação de dispositivos semicondutores baseados em filmes de carbeto de silício crescidos por PECVD.
by: Alessandro Ricardo de Oliveira
Published: (2006)

Estudo da viabilidade de fabricação de dispositivos semicondutores baseados em filmes de carbeto de silício crescidos por PECVD.
by: Oliveira, Alessandro Ricardo de
Published: (2006)

Transparent Electrothermal Heaters Based on Vertically-Oriented Graphene Glass Hybrid Materials
by: Lingzhi Cui, et al.
Published: (2019-04-01)

Optimized amorphous silicon nitride layers for the front side passivation of c-Si PERC solar cells
by: Mohamed Okasha Mohamed Okasha Asmaa, et al.
Published: (2020-01-01)

Développement par PECVD de membranes conductrices protoniques de type phosphonique pour la production d’hydrogène par (photo-)électrolyse de l’eau
by: Kinfack leoga, Arnaud
Published: (2018)

Remote plasma chemical vapor deposition for high efficiency heterojunction solar cells on low cost, ultra-thin, semiconductor-on-metal substrates
by: Onyegam, Emmanuel U.
Published: (2015)

Membranes PECVD à base de a-SiCxNyH pour la séparation de l’hydrogène
by: Haacké, Mathias
Published: (2015)

Compositional, Structural, Morphological, and Optical Properties of ZnO Thin Films Prepared by PECVD Technique
by: Noureddine Hacini, et al.
Published: (2021-02-01)

Investigasi Pengaruh Daya RF terhadap Morfologi Silicon Nanowire pada Penumbuhan dengan Metode PECVD
by: Aulia Fikri Hidayat, et al.
Published: (2019-05-01)

Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications
by: Oleśko Katarzyna, et al.
Published: (2018-05-01)

Effect of deposition time on structure of silver nanoparticles embedded in diamond-like carbon matrix made by RF-PECVD method
by: S Abdolghaderi, et al.
Published: (2015-01-01)

Evaluation of graphene as a transparent electrode in GaN-based LEDs by PECVD synthesis of graphene directly on GaN
by: Johansson, Linus
Published: (2016)

Estudo e produção de filmes de oxinitreto de silício (SiOxNy) pela técnica de PECVD.
by: Denise Criado Pereira de Souza
Published: (2003)