Deposition and modelling of lead zirconate titanate thin films on stainless steel for MEMS applications

Deposition and modelling of lead zirconate titanate thin films on stainless steel for MEMS applications

Technological development is permanently advancing in the direction of miniaturisation and energy consumption reduction. One of the keys to this pathway lies in the integration of ferroelectric thin films into Micro-Electro-Mechanical Systems (MEMS) applications. For this purpose, due to its large p...

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Bibliographic Details
Main Author: Cardoletti, Juliette
Format: Others
Language:en
Published: 2021
Online Access:https://tuprints.ulb.tu-darmstadt.de/19663/1/J.%20Cardoletti%20-%20Deposition%20and%20modelling%20of%20lead%20zirconate%20titanate%20thin%20films%20on%20stainless%20steel%20for%20MEMS%20applications.pdf
Cardoletti, Juliette <http://tuprints.ulb.tu-darmstadt.de/view/person/Cardoletti=3AJuliette=3A=3A.html> (2021):Deposition and modelling of lead zirconate titanate thin films on stainless steel for MEMS applications. (Publisher's Version)Darmstadt, Technische Universität, DOI: 10.26083/tuprints-00019663 <https://doi.org/10.26083/tuprints-00019663>, [Ph.D. Thesis]

Internet

https://tuprints.ulb.tu-darmstadt.de/19663/1/J.%20Cardoletti%20-%20Deposition%20and%20modelling%20of%20lead%20zirconate%20titanate%20thin%20films%20on%20stainless%20steel%20for%20MEMS%20applications.pdf
Cardoletti, Juliette <http://tuprints.ulb.tu-darmstadt.de/view/person/Cardoletti=3AJuliette=3A=3A.html> (2021):Deposition and modelling of lead zirconate titanate thin films on stainless steel for MEMS applications. (Publisher's Version)Darmstadt, Technische Universität, DOI: 10.26083/tuprints-00019663 <https://doi.org/10.26083/tuprints-00019663>, [Ph.D. Thesis]

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