HIGH PERFORMANCE PIEZOELECTRIC MATERIALS AND DEVICES FOR MULTILAYER LOW TEMPERATURE CO-FIRED CERAMIC BASED MICROFLUIDIC SYSTEMS

HIGH PERFORMANCE PIEZOELECTRIC MATERIALS AND DEVICES FOR MULTILAYER LOW TEMPERATURE CO-FIRED CERAMIC BASED MICROFLUIDIC SYSTEMS

The incorporation of active piezoelectric elements and fluidic components into micro-electromechanical systems (MEMS) is of great interest for the development of sensors, actuators, and integrated systems used in microfluidics. Low temperature cofired ceramics (LTCC), widely used as electronic packa...

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Bibliographic Details
Main Author: Zhang, Wenli
Format: Others
Published: UKnowledge 2011
Subjects:
Low temperature co-fired ceramics (LTCC)
Piezoelectric ceramics
Multilayer structure
Microfluidics
Micropump
Materials Science and Engineering
Online Access:http://uknowledge.uky.edu/gradschool_diss/200
http://uknowledge.uky.edu/cgi/viewcontent.cgi?article=1192&context=gradschool_diss

Internet

http://uknowledge.uky.edu/gradschool_diss/200
http://uknowledge.uky.edu/cgi/viewcontent.cgi?article=1192&context=gradschool_diss

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