A Materials Approach to Silicon Wafer Level Contamination Issues from the Wet Clean Process
Semiconductor devices are built using hyperpure silicon and very controlled levels of doping to create desired electrical properties. Contamination can alter these precisely controlled electrical properties that can render the device non-functional or unreliable. It is desirable to determine what im...
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| Format: | Others |
| Language: | English |
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University of North Texas
1996
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| Online Access: | https://digital.library.unt.edu/ark:/67531/metadc278380/ |