Free Radical Chemistries at the Surface of Electronic Materials
The focus of the following research was to (1) understand the chemistry involved in nitriding an organosilicate glass substrate prior to tantalum deposition, as well as the effect nitrogen incorporation plays on subsequent tantalum deposition and (2) the reduction of a native oxide, the removal of s...
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| Format: | Others |
| Language: | English |
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University of North Texas
2010
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| Online Access: | https://digital.library.unt.edu/ark:/67531/metadc31552/ |