Characterization of Methyltrimethoxysilane Sol-Gel Polymerization and the Resulting Aerogels.

Methyl-functionalized porous silica is of considerable interest as a low dielectric constant film for semiconductor devices. The structural development of these materials appears to affect their gelation behaviors and impact their mechanical properties and shrinkage during processing. 29Si solution...

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Bibliographic Details
Main Author: Dong, Hanjiang
Other Authors: Reidy, Richard
Format: Others
Language:English
Published: University of North Texas 2003
Subjects:
NMR
Online Access:https://digital.library.unt.edu/ark:/67531/metadc4266/