Passivation effects of surface iodine layer on tantalum for the electroless copper deposition.

The ability to passivate metallic surfaces under non-UHV conditions is not only of fundamental interests, but also of growing practical importance in catalysis and microelectronics. In this work, the passivation effect of a surface iodine layer on air-exposed Ta for the copper electroless deposition...

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Bibliographic Details
Main Author: Liu, Jian
Other Authors: Kelber, Jeffry A.
Format: Others
Language:English
Published: University of North Texas 2004
Subjects:
Online Access:https://digital.library.unt.edu/ark:/67531/metadc5546/