Polarization Dependent Femtosecond Laser Microstructuring of Silicon
Microstructuring of silicon is performed to alter its optical and electrical properties for use in photonic devices. Femtosecond lasers are a favourable structuring tool because they are extremely precise due to the confinement of their interaction to the focal volume. Experiments were carried out o...
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| Language: | en |
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Université d'Ottawa / University of Ottawa
2015
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| Online Access: | http://hdl.handle.net/10393/31909 http://dx.doi.org/10.20381/ruor-6801 |