Thin film coating of nano-particles in a capacitively coupled RF discharge
Presently, nanocomposite materials have numerous applications, especially in the fields of materials for electronics, aerospace industry, biotechnologies and medicine. Utilization of plasma technologies can offer new production methods of such materials, in particular, the use of non-thermal plasmas...
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| Language: | English |
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Université de Sherbrooke
2003
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| Online Access: | http://savoirs.usherbrooke.ca/handle/11143/1753 |