Aufbau einer Interferenzlithografie-Anlage zur Herstellung photonischer Kristalle
Multiple laser beam interference allows to produce periodic light patterns in the order of the wavelength of light. A simulation program helps to identify different patterns and to investigate the influence of changing parameters such as e.g. the angle of incidence or the polarization. A positive ph...
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Format: | Others |
Language: | de |
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Rheinische Friedrich-Wilhelms-Universität Bonn
2016
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Online Access: | http://hdl.handle.net/10919/71551 |