Laser beam interaction with materials for microscale applications

Laser beam interaction with materials for microscale applications

"Laser micromachining is essential in today’s advanced manufacturing, of e.g., printed circuit boards and electronic components, especially laser microdrilling. Continued demands for miniaturization, in particular of high-performance MEMS components, have generated a need for smaller holes a...

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Bibliographic Details
Main Author: Nowakowski, Krzysztof A.
Other Authors: John M. Sullivan, Jr., Committee Member
Format: Others
Published: Digital WPI 2005
Subjects:
laser beam characteristics
heat transfer
hole profile
MEMS
hole formation
laser micromachining
laser microdrilling
plasma effects
numerical calculations
analytical solutions
silicon
304 stainless steel
Fourier theory
lattice-phonon vibration
Microelectromechanical systems
Laser beams
Online Access:https://digitalcommons.wpi.edu/etd-dissertations/416
https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=1415&context=etd-dissertations

Internet

https://digitalcommons.wpi.edu/etd-dissertations/416
https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=1415&context=etd-dissertations

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