Study and characetrization of plastic encapsulated packages for MEMS
Technological advancement has thrust MEMS design and fabrication into the forefront of modern technologies. It has become sufficiently self-sustained to allow mass production. The limiting factor which is stalling commercialization of MEMS is the packaging and device reliability. The challenging...
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Digital WPI
2005
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Online Access: | https://digitalcommons.wpi.edu/etd-theses/100 https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=1099&context=etd-theses |