Study and characetrization of plastic encapsulated packages for MEMS

Technological advancement has thrust MEMS design and fabrication into the forefront of modern technologies. It has become sufficiently self-sustained to allow mass production. The limiting factor which is stalling commercialization of MEMS is the packaging and device reliability. The challenging...

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Bibliographic Details
Main Author: Deshpande, Anjali W
Other Authors: John M. Sullivan, Jr., Committee Member
Format: Others
Published: Digital WPI 2005
Subjects:
Online Access:https://digitalcommons.wpi.edu/etd-theses/100
https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=1099&context=etd-theses