Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature
Continued demands for better control of the operating conditions of structures and processes have led to the need for better means of measuring temperature (T), pressure (P), and relative humidity (RH). One way to satisfy this need is to use MEMS technology to develop a sensor that will contain, in...
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Digital WPI
2003
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| Online Access: | https://digitalcommons.wpi.edu/etd-theses/815 https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=1814&context=etd-theses |